RESER Robot Technology - Services for Wafer Handling Robots

Services for Wafer Handling Robots

We specialize in the repair and refurbishment of all wafer handling equipment manufactured by Genmark, PRI/Equipe and Brooks. We also facilitate the repair of units manufactured by other manufacturers.

We offer 3 different types of service for wafer handling robots:

Repair	Diagnose Repair of broken parts Preventive Maintenance Repeatability and wafer shuffle testing Operational qualification 3 months warranty
Refurbishment Level 1	Diagnose Complete inspection of all moving items inside robot Repair of broken items Preventive replacement of high wear items Leveling and calibration Repeatability and wafer shuffle testing Operational qualification 6 months warranty
Refurbishment Level 2	Diagnose Preventive replacement of ALL moving parts: All motors All bearings All timing belts Vacuum circuit Cables that move during operation Leveling and calibration Repeatability and wafer shuffle testing Operational qualification 12 months warranty

All refurbished/repaired products are provided with:

Certificate of compliance to demonstrate that the product has passed the complete RESER test program.
Overview of items that are exchanged/refurbished
Calibration parameter overview
Parts are replaced with OEM original substitutes
Some upgrades to improve reliability